Laboratories: Micro- and Mini-Testing

Our resources in micro and mini-testing include: an electrically-actuated micro-tensile tester; a piezo-electrically driven micro-fatigue system, a micro-bend testing system, and an Instron Minitester. These enable to test MEMS structures, and a wide range of thin films.

Instron Minitester
This is an Instron Minitester that is used in the testing of metallic MEMS thin films, nanostructured and amorphous metals and their alloys, and natural fiber-reinforced composites. The system includes a dedicated Questar telescope for in-situ imaging (resolution of ~2.5 µm) and in-situ strain mapping capabilities.
Clean Room
This is an image from our Class 1000 clean room which houses our micro-testers for MEMS testing. Our facilities include an electric motor-driven micro-tensile testing system, a micro-bend testing system, and a micro-cantilever testing system. The work here focuses on MEMS/thin films reliability physics.