Programs: MEMS/Nanoscale Thin Films

Ongoing work is exploring the science-based design of reliable Micro-Electro-Mechanical Systems (MEMS) for micro-switches, and accelerometers. Charge transport and device performance are also being studied in solar cells and light emitting devices produced using low-cost micro- and nano-fabrication methods.

MEMS Accelerometer
The MEMS accelerometer consists of interdigitating comb-drivers that oscillate in ways that can be used to deduce the acceleration or deceleration prior to a car accident. The capacitive signals from such devices are being used to deploy airbags. However, the cyclic loading of the drivers can lead to fatigue failures which are being studied in USAMI research.
OLED Diagram
The is an exploded view of an OLED pixel. It shows how hole injectors and electron injectors can be used to produce light in sandwich structures. Such small OLED pixels are being fabricated using low-cost micro- and nano-fabrication methods that include cold welding and organic pattern transfer.
Microswitch Diagram
The is an exploded view of a microswitch. It is used for passing current in a wide range of micr devices. Such devices may be used in radio-frequency switches where they are actuated to pass current through metal contacts for millions of cyclic contacts. however, they may fail by adhesion or stiction phenomena. The underlying science of adhesion and stiction are being studied in ongoing work on Au MEMS structures.